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Proceedings Paper

All-optical ultra-high accuracy displacement sensors with detection means
Author(s): Yves Bellouard; Ali A. Said; Mark Dugan; Philippe Bado
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Paper Abstract

This paper reports a novel approach based on femtosecond laser processing to design micro-mechanical sensors such as force and displacement sensors. The basic concept is to combine integrated optics and mechanical functions in a single piece of glass. It differs from previous micro displacement sensor works in that the measured variable is optical rather than electrically based (strain-resistive, piezo-electric, etc.). Furthermore, a single process is used to define both the optical and the mechanical features. This significantly simplifies the overall fabrication and eliminates alignment issues associated with sequential fabrication processes.

Paper Details

Date Published: 3 November 2005
PDF: 14 pages
Proc. SPIE 5989, Technologies for Optical Countermeasures II; Femtosecond Phenomena II; and Passive Millimetre-Wave and Terahertz Imaging II, 59890V (3 November 2005); doi: 10.1117/12.629012
Show Author Affiliations
Yves Bellouard, Technical Univ. Eindhoven (Netherlands)
Ali A. Said, Translume Inc. (United States)
Mark Dugan, Translume Inc. (United States)
Philippe Bado, Translume Inc. (United States)


Published in SPIE Proceedings Vol. 5989:
Technologies for Optical Countermeasures II; Femtosecond Phenomena II; and Passive Millimetre-Wave and Terahertz Imaging II
Sean M. Kirkpatrick; David H. Titterton; Roger Appleby; J. Martyn Chamberlain; Razvan Stoian; Keith A. Krapels, Editor(s)

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