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Proceedings Paper

OVPD: OLED manufacturing coming of age
Author(s): Bastian Marheineke
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Paper Abstract

In this paper achievements utilising Organic Vapor Phase Deposition (OVPD) are reviewed and presented together with recent results. Organic thin films could be deposited with a high degree of accuracy and reproducibility. Organic Light Emitting Diodes (OLEDs) were compared to devices manufactured with conventional techniques and showed similar or even slightly better performance. The combination of OVPD with Close Coupled Showerhead (CCS) technology results in manufacturing equipment with vast potential for cost effective manufacturing of OLED displays commercially competitive to LCD.

Paper Details

Date Published: 29 July 2005
PDF: 13 pages
Proc. SPIE 5961, Building European OLED Infrastructure, 596101 (29 July 2005); doi: 10.1117/12.628987
Show Author Affiliations
Bastian Marheineke, AIXTRON AG (Germany)


Published in SPIE Proceedings Vol. 5961:
Building European OLED Infrastructure
Thomas P. Pearsall; Jonathan Halls, Editor(s)

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