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Proceedings Paper

Plasma and chemical treatments of polyimide sacrificial layers in processing of microblolometers
Author(s): Petr G. Babaevsky; Andrey A. Zhukov; Svetlana A. Zhukova; Yury S. Tchetverov
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Paper Abstract

Methods and objectives of plasma and chemical treatments of thin polyimide (Pt) coatings used as "sacrificial" layers in microbolometer processing have been analysed. Physical and chemical effects and mechanisms of surface plasma and chemical treatment of P1 layers and their anisotropic plasma etching with given wall sloping angles and from a gap have been integrated. Revealed mechanisms enabled to optimize P1 plasma and chemical treatment parameters in processing of microbolometer matrices of sizes 2x48, 160x120 and 320x240 pixels.

Paper Details

Date Published: 7 June 2005
PDF: 7 pages
Proc. SPIE 5834, 18th International Conference on Photoelectronics and Night Vision Devices, (7 June 2005); doi: 10.1117/12.628861
Show Author Affiliations
Petr G. Babaevsky, MATI--Tsiolokovsky Russian State Technology Univ. of Technology (Russia)
Andrey A. Zhukov, CNII Cyclon (Russia)
Svetlana A. Zhukova, CNII Cyclon (Russia)
Yury S. Tchetverov, CNII Cyclon (Russia)

Published in SPIE Proceedings Vol. 5834:
18th International Conference on Photoelectronics and Night Vision Devices
Anatoly M. Filachov; Vladimir P. Ponomarenko; Alexander I. Dirochka, Editor(s)

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