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Proceedings Paper

Laser cleaning of microparticles: theoretical prediction of threshold laser fluence
Author(s): Yongfeng Lu; Wen Dong Song; Minghui Hong; Daniel S. H. Chan; Tohsiew Low
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Paper Abstract

A theoretical model for laser cleaning of microparticles from solid surface was established by taking adhesion force and cleaning force into account. The threshold fluence can be obtained from this model and verified by the experimental results. It was found that laser irradiation from the reverse side of transparent substrate is more effective to remove particles than that from the front side. Laser irradiation with shorter wavelength can result in higher cleaning efficiency and lower threshold fluence for removal of particles from solid surfaces. Keywords: Laser cleaning, microparticles, Van der Waals force, cleaning force, cleaning threshold

Paper Details

Date Published: 18 August 1997
PDF: 6 pages
Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); doi: 10.1117/12.628227
Show Author Affiliations
Yongfeng Lu, National Univ. of Singapore (United States)
Wen Dong Song, National Univ. of Singapore (Singapore)
Minghui Hong, National Univ. of Singapore (Singapore)
Daniel S. H. Chan, National Univ. of Singapore (Singapore)
Tohsiew Low, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 3097:
Lasers in Material Processing
Leo H. J. F. Beckmann, Editor(s)

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