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Proceedings Paper

Emerging nanoelectric device technologies
Author(s): Wolfgang Porod
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Date Published:
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Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, ; doi: 10.1117/12.628052
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Wolfgang Porod, Univ. of Notre Dame (United States)


Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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