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Proceedings Paper

InAs/GaSb superlattice focal plane arrays for high-resolution thermal imaging
Author(s): Robert Rehm; Martin Walther; Johannes Schmitz; Joachim Fleißner; Frank Fuchs; Johann Ziegler; Wolfgang Cabanski
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Paper Abstract

The first fully operational mid-IR (3-5 μm) 256x256 IR-FPA camera system based on a type-II InAs/GaSb short-period superlattice showing an excellent noise equivalent temperature difference below 10 mK and a very uniform performance has been realized. We report on the development and fabrication of the detector chip, i.e., epitaxy, processing technology and electro-optical characterization of fully integrated InAs/GaSb superlattice focal plane arrays. While the superlattice design employed for the first demonstrator camera yielded a quantum efficiency around 30%, a superlattice structure grown with a thicker active layer and an optimized V/III BEP ratio during growth of the InAs layers exhibits a significant increase in quantum efficiency. Quantitative responsivity measurements reveal a quantum efficiency of about 60% for InAs/GaSb superlattice focal plane arrays after implementing this design improvement.

Paper Details

Date Published: 29 September 2005
PDF: 8 pages
Proc. SPIE 5957, Infrared Photoelectronics, 595707 (29 September 2005); doi: 10.1117/12.627054
Show Author Affiliations
Robert Rehm, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Martin Walther, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Johannes Schmitz, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Joachim Fleißner, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Frank Fuchs, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Johann Ziegler, AIM Infrarot-Module GmbH (Germany)
Wolfgang Cabanski, AIM Infrarot-Module GmbH (Germany)


Published in SPIE Proceedings Vol. 5957:
Infrared Photoelectronics
Antoni Rogalski; Eustace L. Dereniak; Fiodor F. Sizov, Editor(s)

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