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Proceedings Paper

Development of laser plasma-based soft x-ray microscopy
Author(s): Jong-Hyeok Lim; Ki-Yong Nam; Kyong-Woo Kim; Young-Man Kwon; Jeon-Goun Park; Jong Hwan Min; Hyun-Hwa Son; Jin-Young Min; Kwon-Ha Yoon
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Paper Abstract

A compact soft X-ray microscope system has been developed for biological applications with nano-scale resolution. Soft X-ray used to the system is emitted from a solid target by using Nd-YAG pulsed laser. Boron nitride (BN) is used as the target materials in the system. The optics of the microscope system is adopted with wolter type-I mirrors, which is consisted of a condenser mirror with demagnification of 1/4× and an object mirror with magnification of 32×. The surface roughness of the machined wolter mirrors is about 0.8 nm (Ra) after polishing. In this paper, the X-ray characteristics, i.e., spectrum and intensity emitted from laser plasma-based x-ray source was measured. Imaging test using the system was performed with gold 2000 mesh. The spatial resolution of the soft x-ray microscope system was obtained about 900 nm.

Paper Details

Date Published: 31 August 2005
PDF: 6 pages
Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II, 59181B (31 August 2005); doi: 10.1117/12.626319
Show Author Affiliations
Jong-Hyeok Lim, Wonkwang Univ. (South Korea)
Ki-Yong Nam, Wonkwang Univ. (South Korea)
Kyong-Woo Kim, Wonkwang Univ. (South Korea)
Young-Man Kwon, Wonkwang Univ. (South Korea)
Jeon-Goun Park, Wonkwang Univ. (South Korea)
Jong Hwan Min, Wonkwang Univ. (South Korea)
Hyun-Hwa Son, Wonkwang Univ. (South Korea)
Jin-Young Min, LISTEM Co. (South Korea)
Kwon-Ha Yoon, Wonkwang Univ. (South Korea)

Published in SPIE Proceedings Vol. 5918:
Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II
George A. Kyrala; Jean-Claude J. Gauthier; Carolyn A. MacDonald; Ali M. Khounsary, Editor(s)

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