Share Email Print
cover

Proceedings Paper

Mueller polarimetry in conical diffraction for CD measurements in microelectronics (post-deadline presentation)
Author(s): Tatiana Novikova; Antonello De Martino; Sami Ben-Hatit; Bernard Drévillon; Denis Cattelan
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 587809; doi: 10.1117/12.626179
Show Author Affiliations
Tatiana Novikova, École Polytechnique (France)
Antonello De Martino, École Polytechnique (France)
Sami Ben-Hatit, École Polytechnique (France)
Bernard Drévillon, École Polytechnique (France)
Denis Cattelan, HORIBA Jobin Yvon (France)


Published in SPIE Proceedings Vol. 5878:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
Angela Duparre; Bhanwar Singh; Zu-Han Gu, Editor(s)

© SPIE. Terms of Use
Back to Top