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Proceedings Paper

Mounting an EUV Schwarzschild microscope lens
Author(s): Thomas Peschel; Henrik Banse; Christoph Damm; Ramona Eberhardt
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Paper Abstract

A 21x Schwarzschild microscope lens for the EUV spectral range with a numerical aperture of 0.2 was designed and fabricated. The mechanical design of the lens had to comply with high requirements on surface figure amounting to 0.4 nm r.m.s. error for both mirrors. An optimized mirror mount was developed which is based on solid state hinges. In particular, gravity load, intrinsic stresses of the multilayer reflective coating as well as mounting forces and possibilities for mirror adjustment had to be considered. To provide a completely hydro-carbon free design the hinges were connected to the mirror by flux-less soldering.

Paper Details

Date Published: 14 October 2005
PDF: 8 pages
Proc. SPIE 5962, Optical Design and Engineering II, 59621H (14 October 2005); doi: 10.1117/12.625553
Show Author Affiliations
Thomas Peschel, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Henrik Banse, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Christoph Damm, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Ramona Eberhardt, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 5962:
Optical Design and Engineering II
Laurent Mazuray; Rolf Wartmann, Editor(s)

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