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Proceedings Paper

Active shape adjustable polishing tools
Author(s): C. T. Weber; J. Weiser; V. Galazky; C. Weber; V. Herold; St. Eckner
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Paper Abstract

The polishing of optical structures is as process applied to smooth surfaces while maintaining the precise shapes obtained through grinding in a process before. Until now, the macrogeometry during the polishing process is mostly influenced and adjusted by changing the kinematik, temperature of polishing fluid or by dressing the polishing pad. These exertions of influence are being applied mostly empirical. Another approach is subject of this paper: introducing an active polishing tool with a membrane like surface, which can be deformed by pneumatic actuation under maintainance of an shperic profile. This tool even allows the change of the shape of the optical surface during the polishing process.

Paper Details

Date Published: 21 October 2005
PDF: 6 pages
Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596520 (21 October 2005); doi: 10.1117/12.625548
Show Author Affiliations
C. T. Weber, IGAM-Ingenieurgesellschaft für angewandte Mechanik mbH (Germany)
J. Weiser, IGAM-Ingenieurgesellschaft für angewandte Mechanik mbH (Germany)
V. Galazky, IGAM-Ingenieurgesellschaft für angewandte Mechanik mbH (Germany)
C. Weber, Carl Zeiss Jena GmbH (Germany)
V. Herold, Friedrich-Schiller-Univ. Jena (Germany)
St. Eckner, Friedrich-Schiller-Univ. Jena (Germany)


Published in SPIE Proceedings Vol. 5965:
Optical Fabrication, Testing, and Metrology II
Angela Duparré; Roland Geyl; Lingli Wang, Editor(s)

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