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Proceedings Paper

A new optical metrology tool for measuring aspheres
Author(s): Gerd Jakob; Matthias Meyer; Thomas Fries
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Paper Abstract

One of the most actual needs in metrology is the possibility to investigate aspheres. With many optical metrology tools this is just not possible in a direct way. This task needs a completely new category of metrology tools. A new approach for this application is presented. The measuring machine performs high resolution, fast and non contact measurement of lens profiles. The geometry of the lens might be spherical or aspherical. The maximum profile length is 180 degree, maximum lens height is 50 mm. The alignment of the centre of the lens is done automatically. As an option the system may be extended into a fully 3D metrology tool.

Paper Details

Date Published: 19 October 2005
PDF: 7 pages
Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 59651Z (19 October 2005); doi: 10.1117/12.625534
Show Author Affiliations
Gerd Jakob, Fries Research and Technology GmbH (Germany)
Matthias Meyer, Fries Research and Technology GmbH (Germany)
Thomas Fries, Fries Research and Technology GmbH (Germany)


Published in SPIE Proceedings Vol. 5965:
Optical Fabrication, Testing, and Metrology II
Angela Duparré; Roland Geyl; Lingli Wang, Editor(s)

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