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Proceedings Paper

A multi sensor metrology tool for nanometer to meter measurements
Author(s): Thomas Fries
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Paper Abstract

One of the actual challenges in optics is the fabrication of micro lenses as a part of MEMS or even integrated in macroscopic systems. This task needs a completely new category of metrology devices. To fill the gap in dimensions occuring with this technologies between the milli-/micrometer technology and the nano-/subnanometer technology, it is now possible for the surface measuring instrument MicroGlider(R) from FRT GmbH to be optionally equipped with up to 17 different sensors, most of which are optical sensors. Various optical principles are under use, to meet the different needs of devices under investigation, depending on material, surface character or necessary resolution. In addition an Atomic Force Microscope (AFM) may also be added. The AFM is fixed to the instrument additionally to the standard optical topography sensor. If necessary, a spot will be selected into the available overview measurement to determine the measuring range of the AFM. The AFM is able to investigate structures down to the atomic range. The measuring instrument enables the combination of measuring ranges from 100 mm, 350 mm or 600 mm with resolutions down to the sub-nanometer range in one single instrument.

Paper Details

Date Published: 20 October 2005
PDF: 8 pages
Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596507 (20 October 2005); doi: 10.1117/12.625531
Show Author Affiliations
Thomas Fries, Fries Research and Technology GmbH (Germany)


Published in SPIE Proceedings Vol. 5965:
Optical Fabrication, Testing, and Metrology II
Angela Duparré; Roland Geyl; Lingli Wang, Editor(s)

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