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Proceedings Paper

The detection of cyclic nonlinearities in a ZMI2000 heterodyne interferometer
Author(s): Jorrit Thijsse; Asa K. Jamting; Nick Brown; Han Haitjema
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Paper Abstract

In this study, the non-linear errors in a commercial heterodyne interferometer are investigated. There are two types of cyclic nonlinearities present in heterodyne interferometers and it is desirable to be able to measure these nonlinearities in order to quantify the uncertainty of the interferometer setup. The current study investigates whether the nonlinearities can be detected by measuring the optical power of the interferometers output signal as a function of its phase. In theory, the optical power can be described as a perfect circle in polar coordinates in the absence of cyclic errors. The cyclic errors present, then manifest themselves as ellipticity of this circle and a translation of its centre. In this study large cyclic nonlinearities were deliberately introduced into a standard heterodyne interferometer setup, making them large enough to measure directly from the displacement data. Comparison with predicted nonlinearities calculated from the optical power data showed a good fit, indicating that it is possible to predict cyclic nonlinearities by reading the optical power from the measurement board.

Paper Details

Date Published: 18 August 2005
PDF: 11 pages
Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 58790M (18 August 2005); doi: 10.1117/12.625469
Show Author Affiliations
Jorrit Thijsse, Eindhoven Univ. of Technology (Netherlands)
Asa K. Jamting, National Measurement Institute Australia (Australia)
Nick Brown, National Measurement Institute Australia (Australia)
Han Haitjema, Mitutoyo Research Center Europe B.V. (Netherlands)
Eindhoven Univ. of Technology (Netherlands)


Published in SPIE Proceedings Vol. 5879:
Recent Developments in Traceable Dimensional Measurements III
Jennifer E. Decker; Gwo-Sheng Peng, Editor(s)

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