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Proceedings Paper

Combined elements for beam shaping and polarization management
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Paper Abstract

Micro and nano optics enable the control of light for producing intensity distributions with given profiles, propagation properties and polarization states. The higher the requirements on the optical function, the more complicated will be its realizing with a single element surface or a single element class. Combinations of refractive and diffractive, both diffractive or sub-wavelength structures with each other give the ability to link the advantages of different element classes or different element functions for realizing the optical functionality. In the paper we discuss two different examples of combinations for DUV applications. In detail we present a diffractive - diffractive beam homogenizer with NA of 0.3 that show no zero order. A binary phase grating for polarization control combined with a beam shaping element will be presented. The polarized order of this grating shows an efficiency of about 90% with a degree of polarization better than 90%. Wave optical and rigorous design strategies and simulations as well as the optical measurements will be discussed for the given examples.

Paper Details

Date Published: 15 October 2005
PDF: 10 pages
Proc. SPIE 5962, Optical Design and Engineering II, 59621B (15 October 2005); doi: 10.1117/12.625206
Show Author Affiliations
Matthias Cumme, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Peter Triebel, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Dirk Mademann, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Manfred Schrenk, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Peter Weissbrodt, JENOPTIK Laser, Optik, Systeme GmbH (Germany)


Published in SPIE Proceedings Vol. 5962:
Optical Design and Engineering II
Laurent Mazuray; Rolf Wartmann, Editor(s)

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