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Proceedings Paper

VUV optical coatings for the next-generation micro-mechanical mirrors
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Paper Abstract

This paper deals with vacuum UV optical coatings for micro mirrors applications. High reflecting low-stress optical coatings for the next-generation of micro mechanical mirrors have been developed. The optimized metal systems are applicable for the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors.

Paper Details

Date Published: 5 October 2005
PDF: 7 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 596322 (5 October 2005); doi: 10.1117/12.625138
Show Author Affiliations
Minghong Yang, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Alexandre Gatto, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Norbert Kaiser, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Jan Uwe Schmidt, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Thilo Sandner, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Jörg Heber, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Harald Schenk, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Hubert Lakner, Fraunhofer Institut Photonische Mikrosysteme (Germany)


Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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