Share Email Print
cover

Proceedings Paper

Aluminum-enhanced optical coatings for the VUV spectral range
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

This paper deals with the approaches to preserve the high reflectance aluminum mirror for the VUV spectral region. Single fluoride and oxides layer, homogeneous multilayer and hybrid multilayer solutions are put forward. Single fluoride and oxides materials have achieved reflectance above 90% at 193 nm.

Paper Details

Date Published: 4 October 2005
PDF: 8 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 59630M (4 October 2005); doi: 10.1117/12.625133
Show Author Affiliations
Minghong Yang, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Alexandre Gatto, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Norbert Kaiser, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)


Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

© SPIE. Terms of Use
Back to Top