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Proceedings Paper

Off axis microspectrophotometer for optical coating characterization on complex surfaces
Author(s): Hansjörg Niederwald; Lothar Deisenroth; Sebastian Nunnendorf
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Paper Abstract

Optical thin films, especially reflection reducing coatings, are often applied to complex surfaces, e.g. small and strongly curved optical elements that are built into optical devices like object lenses for microscopes. The performance of the device depends very much on the optical quality throughout the entire surface of the optical element. In order to measure optical parameters in defined positions of a given optical surface, a fully automated microspectrophotometer for in line quality control was developed. The microspectrophotometer consists of a Zeiss MCS 501 diode array spectrometer that is capable of fast and simultaneous data acquisition over the desired spectrum between NUV and NIR, connected via light waveguide to a Zeiss Axiostar microscope, which is operated in the reflected-light-brightfield mode, and a sample handling system that can be programmed to measure any spot on the individual surface of the optical element under examination. The size of the measured spot is in the order of about ten micrometers in diameter, allowing also characterization of defects and microscopic deviations from the desired thin film coating or optical surface. The principle and the assembly of the microspectrophotometer are presented as well as measurements of uniformity distributions of antireflection coatings on small semispheres achieved by different coating processes.

Paper Details

Date Published: 19 October 2005
PDF: 7 pages
Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 59651S (19 October 2005); doi: 10.1117/12.625126
Show Author Affiliations
Hansjörg Niederwald, Carl Zeiss AG (Germany)
Lothar Deisenroth, Carl Zeiss AG (Germany)
Sebastian Nunnendorf, Carl Zeiss AG (Germany)


Published in SPIE Proceedings Vol. 5965:
Optical Fabrication, Testing, and Metrology II
Angela Duparré; Roland Geyl; Lingli Wang, Editor(s)

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