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Proceedings Paper

Temperature dependence of the optical properties of mixed oxide thin films deposited by reactive magnetron sputtering
Author(s): M. Vergöhl; B. Hunsche; A. Ritz
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Paper Abstract

The optical properties of TaZrOx mixed oxide thin films are investigated. The films were deposited by reactive pulsed magnetron sputtering in a double magnetron set up using two Ta and Zr metallic targets. Depending on the mixture of the materials, crystallization at different temperature occurs. For a specific mixture, temperature stability of more than 950°C could be demonstrated. This is more than another value of TiAlOx thin films reported very recently.

Paper Details

Date Published: 4 October 2005
PDF: 8 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 596315 (4 October 2005); doi: 10.1117/12.625069
Show Author Affiliations
M. Vergöhl, Fraunhofer Institute for Thin Films and Surface Engineering (Germany)
B. Hunsche, Philips Research Labs. (Germany)
A. Ritz, Philips Research Labs. (Germany)

Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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