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Proceedings Paper

High-performance Cr/Sc multilayers for the soft x-ray range
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Paper Abstract

Results of soft x-ray reflection measurements of Cr/Sc multilayer mirrors close to the Sc-L (λ = 3.11 nm) and C-K (λ = 4.44 nm) absorption edges are presented. In particular, normal-incidence reflectivity measurements performed at BESSY II facility revealed a reflectivity of R = 17.3% @ 3.11 nm and 7.0 % @ 4.44 nm. Simulation results show that the interface roughness in the best Cr/Sc structures are less than 0.4 nm and strongly depend on the crystal-line structure of the layers.

Paper Details

Date Published: 5 October 2005
PDF: 7 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 59631T (5 October 2005); doi: 10.1117/12.624868
Show Author Affiliations
Sergiy Yulin, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Torsten Feigl, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Norbert Kaiser, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)


Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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