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Proceedings Paper

Uncooled 160x120 microbolometer IR FPA based on sol-gel VOx
Author(s): Michael A. Dem'yanenko; Boris I. Fomin; Victor N. Ovsyuk; Igor V. Marchishin; Igor O. Parm; Lyudmila L. Vasil'ieva; Valeri V. Shashkin
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Paper Abstract

The technology of high-quality microbolometer focal plane arrays (FPA) fabrication has been developed. Simple and cheap sol-gel technology of thermosensitive vanadium oxide layers preparation is underlain in its basis. Uncooled 160×120 microbolometer sensor assemblies for 8-14 microns spectral range have been fabricated. The paper brief outlines simple techniques to measure crosstalk, precision of FPA temperature stabilization and sensor assembly response time to infrared signal change. The noise equivalent temperature difference better than 100 mK has been achieved at frame rate 60 Hz and F/1 optics.

Paper Details

Date Published: 29 September 2005
PDF: 8 pages
Proc. SPIE 5957, Infrared Photoelectronics, 59571R (29 September 2005); doi: 10.1117/12.624670
Show Author Affiliations
Michael A. Dem'yanenko, Institute of Semiconductor Physics (Russia)
Boris I. Fomin, Institute of Semiconductor Physics (Russia)
Victor N. Ovsyuk, Institute of Semiconductor Physics (Russia)
Igor V. Marchishin, Institute of Semiconductor Physics (Russia)
Igor O. Parm, Institute of Semiconductor Physics (Russia)
Lyudmila L. Vasil'ieva, Institute of Semiconductor Physics (Russia)
Valeri V. Shashkin, Institute of Semiconductor Physics (Russia)


Published in SPIE Proceedings Vol. 5957:
Infrared Photoelectronics
Antoni Rogalski; Eustace L. Dereniak; Fiodor F. Sizov, Editor(s)

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