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Proceedings Paper

Bessel beam based optical profilometry
Author(s): V. Belyi; M. Kroening; N. Kazak; N. Khilo; A. Mashchenko; P. Ropot
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Paper Abstract

We present our results of the development of some schemes for nondestructive optical profilometry of cylindrically shaped surfaces by using spatially matched conical light beams. A theoretical model is elaborated which describes profilometers with Bessel beams. A special feature of the profilometers proposed is the possibility to control their sensitivity and resolution. To this end, a scheme of tuning the cone angle of the Bessel beam over a wide range is incorporated. The operation regime of the profilometers is characterized by a nonzero spatial frequency of output signal. It allow us to apply a new algorithm for the interpretation of the output signal. This algorithm consists in the calculation of the azimuth spectrum which characterizes the deviation of tested profiles from the circular ones.

Paper Details

Date Published: 15 October 2005
PDF: 12 pages
Proc. SPIE 5964, Detectors and Associated Signal Processing II, 59640L (15 October 2005); doi: 10.1117/12.624491
Show Author Affiliations
V. Belyi, National Academy of Sciences of Belarus (Belarus)
M. Kroening, Fraunhofer Institute for Nondestructive Testing (Germany)
N. Kazak, Institute of Physics NAN Belarus (Belarus)
N. Khilo, Institute of Physics NAN Belarus (Belarus)
A. Mashchenko, Institute of Physics NAN Belarus (Belarus)
P. Ropot, Institute of Physics NAN Belarus (Belarus)


Published in SPIE Proceedings Vol. 5964:
Detectors and Associated Signal Processing II
Jean-Pierre Chatard; Peter N. J. Dennis, Editor(s)

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