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Proceedings Paper

Polarization-insensitive PECVD SiC waveguides for photonic sensing
Author(s): Gregory Pandraud; Hoa Thi Mai Pham; Lukasz S. Pakula; Pasqualina M. Sarro; Patrick J. French
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Paper Abstract

Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve low Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. Those waveguides have been successfully used in power splitters and cantilivers. These first devices open the way for photonic sensing in harsh environment using SiC.

Paper Details

Date Published: 23 May 2005
PDF: 4 pages
Proc. SPIE 5855, 17th International Conference on Optical Fibre Sensors, (23 May 2005); doi: 10.1117/12.624260
Show Author Affiliations
Gregory Pandraud, Delft Univ. of Technology (Netherlands)
Hoa Thi Mai Pham, Delft Univ. of Technology (Netherlands)
Lukasz S. Pakula, Delft Univ. of Technology (Netherlands)
Pasqualina M. Sarro, Delft Univ. of Technology (Netherlands)
Patrick J. French, Delft Univ. of Technology (Netherlands)


Published in SPIE Proceedings Vol. 5855:
17th International Conference on Optical Fibre Sensors
Marc Voet; Reinhardt Willsch; Wolfgang Ecke; Julian Jones; Brian Culshaw, Editor(s)

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