Share Email Print

Proceedings Paper

Focused ion beam structuring of photonic components and sensors
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper discusses direct focused ion beam (FIB) writing of microstructured photonic elements and sensors like apertures on tips of optical fibers, microlenses, or photonic crystals. Emphasis is mainly on the fabrication side.

Paper Details

Date Published: 23 May 2005
PDF: 4 pages
Proc. SPIE 5855, 17th International Conference on Optical Fibre Sensors, (23 May 2005); doi: 10.1117/12.623455
Show Author Affiliations
Philipp M. Nellen, EMPA (Switzerland)
Rolf Broennimann, EMPA (Switzerland)

Published in SPIE Proceedings Vol. 5855:
17th International Conference on Optical Fibre Sensors
Marc Voet; Reinhardt Willsch; Wolfgang Ecke; Julian Jones; Brian Culshaw, Editor(s)

© SPIE. Terms of Use
Back to Top