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Proceedings Paper

Focused ion beam structuring of photonic components and sensors
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Paper Abstract

This paper discusses direct focused ion beam (FIB) writing of microstructured photonic elements and sensors like apertures on tips of optical fibers, microlenses, or photonic crystals. Emphasis is mainly on the fabrication side.

Paper Details

Date Published: 23 May 2005
PDF: 4 pages
Proc. SPIE 5855, 17th International Conference on Optical Fibre Sensors, (23 May 2005); doi: 10.1117/12.623455
Show Author Affiliations
Philipp M. Nellen, EMPA (Switzerland)
Rolf Broennimann, EMPA (Switzerland)


Published in SPIE Proceedings Vol. 5855:
17th International Conference on Optical Fibre Sensors

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