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Proceedings Paper

Hard x-ray nano-focusing at 40nm level using K-B mirror optics for nanoscopy/spectroscopy
Author(s): Satoshi Matsuyama; Hidekazu Mimura; Hirokatsu Yumoto; Hideyuki Hara; Kazuya Yamamura; Yasuhisa Sano; Katsuyoshi Endo; Yuzo Mori; Yoshinori Nishino; Kenji Tamasaku; Makina Yabashi; Tetsuya Ishikawa; Kazuto Yamauchi
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Paper Abstract

X-ray focusing techniques using Kirkpatrick and Baez mirrors are promising due to their capability of highly efficient and energy-tunable focusing. We have been developing a hard-X-ray focusing system using K-B mirrors for an X-ray microscope. Here, we report the development of a mirror manipulator and focusing tests using the manipulator. Mirror alignment tolerances were estimated using two types of simulators: a ray-trace simulator and a wave-optical simulator. On the basis of the simulation results, the mirror manipulator was developed achieving optimum K-B mirrors setup. The focal size was achieved to be 48 x 36nm2 (V x H) in FWHM at 1km long beamline of SPring-8. The obtained spatial resolution test results indicate that a scanning microscope with the focused beam can resolve the line-and-space patterns of 80nm line width in a high visibility of 60%.

Paper Details

Date Published: 31 August 2005
PDF: 8 pages
Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II, 591804 (31 August 2005); doi: 10.1117/12.623035
Show Author Affiliations
Satoshi Matsuyama, Osaka Univ. (Japan)
Hidekazu Mimura, Osaka Univ. (Japan)
Hirokatsu Yumoto, Osaka Univ. (Japan)
Hideyuki Hara, Osaka Univ. (Japan)
Kazuya Yamamura, Osaka Univ. (Japan)
Yasuhisa Sano, Osaka Univ. (Japan)
Katsuyoshi Endo, Osaka Univ. (Japan)
Yuzo Mori, Osaka Univ. (Japan)
Yoshinori Nishino, SPring-8/RIKEN (Japan)
Kenji Tamasaku, SPring-8/RIKEN (Japan)
Makina Yabashi, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
Tetsuya Ishikawa, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
SPring-8/RIKEN (Japan)
Kazuto Yamauchi, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 5918:
Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II
George A. Kyrala; Jean-Claude J. Gauthier; Carolyn A. MacDonald; Ali M. Khounsary, Editor(s)

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