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Proceedings Paper

Micro/nano grating and its application to moiré measurement
Author(s): Huimin Xie; Zhanwei Liu; Haixia Shang; Qikun Xue; Jinfeng Jia; Daining Fang
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Paper Abstract

In this paper, some novel micro/nano- moire grating fabricating techniques are introduced. The gratings are produced by the SPM lithography, FIB lithography, and molecular beam epitaxy (MBE) method. The moire patterns formed with these gratings are also introduced. The gratings are successfully to be used to measure the residual deformation in the surface around a step edge of the Al/Si artificial nanocluster with the moire methods. The successful experimental results verify the feasibility of these methods.

Paper Details

Date Published: 12 April 2005
PDF: 5 pages
Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); doi: 10.1117/12.621896
Show Author Affiliations
Huimin Xie, Tsinghua Univ. (China)
Zhanwei Liu, Tsinghua Univ. (China)
Haixia Shang, Tsinghua Univ. (China)
Qikun Xue, Institute of Physics (China)
Jinfeng Jia, Institute of Physics (China)
Daining Fang, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 5852:
Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
Chenggen Quan; Fook Siong Chau; Anand Asundi; Brian Stephen Wong; Chwee Teck Lim, Editor(s)

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