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Proceedings Paper

Two-photon photopolymerization for photonic, mechanical and meta-material devices
Author(s): Satoshi Kawata
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Paper Abstract

Two-photon photopolymerization has been recently considered one of the most important micro-nanofabrication technologies. Different from general precision manufacturing approaches, the two-photon method has intrinsic three-dimensional (3D) processing capability with a reasonable spatial resolution around 100 nm. It is potentially a technical route to fabricate 3D multifunctional devices and their spatial integrating system. Here we introduce its use in fabrication of micro-nanophotonic, mechanical and meta-material structures [1-20].

Paper Details

Date Published: 27 August 2005
PDF: 5 pages
Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 59310S (27 August 2005); doi: 10.1117/12.621793
Show Author Affiliations
Satoshi Kawata, Osaka Univ. (Japan)
RIKEN (Japan)


Published in SPIE Proceedings Vol. 5931:
Nanoengineering: Fabrication, Properties, Optics, and Devices II
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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