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Proceedings Paper

Multimode interference devices based on silicon
Author(s): V. J. Cadarso; I. Salinas; A. Llobera; C. Dominguez
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Paper Abstract

Multimode interference devices based on silicon hollow waveguides have been designed, simulated, fabricated and characterized. Adequate confinement of light into a hollow waveguide and minimization of the propagation losses require a roughness of the structure below the working wavelength. This assures to have mirror behavior at the facets that optimize the Fresnel reflections. In order to achieve this low roughness and a perfectly vertical walls, to obtain a rectangular shape, an optimization of the fabrication process, especially deep reactive ion etching process, has been made. The numerical and experimental anti-symmetrical behavior for symmetrical and anti-symmetrical out waveguides in anti-symmetrical multimode interference devices is in accordance with the theory of multimode interference effects. The excellent behavior and properties of these devices shows the silicon hollow waveguides excellent for the design of integrated optical devices.

Paper Details

Date Published: 30 September 2005
PDF: 8 pages
Proc. SPIE 5956, Integrated Optics: Theory and Applications, 595611 (30 September 2005); doi: 10.1117/12.621647
Show Author Affiliations
V. J. Cadarso, IMB-CSIC (Spain)
I. Salinas, Grupo de Tecnologías Fotónicas (Spain)
A. Llobera, IMB-CSIC (Spain)
C. Dominguez, IMB-CSIC (Spain)

Published in SPIE Proceedings Vol. 5956:
Integrated Optics: Theory and Applications
Tadeusz Pustelny; Paul V. Lambeck; Christophe Gorecki, Editor(s)

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