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Proceedings Paper

Advances in interferometric surface metrology
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Paper Abstract

Optical interferometry is being used more and more to solve metrology problems. It is important in giving an insight into the properties of the top surface whether it is a processed surface or a thin film coating This paper will discuss metrology issues and ways in which to solve them using autocorrelation. Autocorrelation now commonly used to extract spatial information from surface profiles. It is suitable for looking at processing issues and identifying any periodic errors. An example showing the use of autocorrelation to solve process issues in diamond turning is shown.

Paper Details

Date Published: 18 August 2005
PDF: 11 pages
Proc. SPIE 5872, Advancements in Polymer Optics Design, Fabrication, and Materials, 587208 (18 August 2005); doi: 10.1117/12.621576
Show Author Affiliations
Mike Conroy, Taylor Hobson Ltd. (United Kingdom)
Joe Armstrong, Taylor Hobson Ltd. (United Kingdom)
Ian Lee-Bennett, Taylor Hobson Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 5872:
Advancements in Polymer Optics Design, Fabrication, and Materials
Timothy D. Goodman, Editor(s)

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