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Proceedings Paper

Carbon nanotube atomic force microscopy probes
Author(s): Shigenobu Yamanaka; Takashi Okawa; Seiji Akita; Yoshikazu Nakayama
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Paper Abstract

We have developed a carbon nanotube atomic force microscope probe. Because the carbon nanotube are well known to have high aspect ratios, small tip radii and high stiffness, carbon nanotube probes have a long lifetime and can be applied for the observation deep trenches. Carbon nanotubes were synthesized by a well-controlled DC arc discharge method, because this method can make nanotubes to have straight shape and high crystalline. The nanotubes were aligned on the knife-edge using an alternating current electrophoresis technique. A commercially available Si probe was used for the base of the nanotube probe. The nanotube probe was fabricated by the SEM manipulation method. The nanotube was then attached tightly to the Si probe by deposition of amorphous carbon. We demonstrate the measurement of a fine pith grating that has vertical walls. However, a carbon nanotube has a problem that is called "Sticking". The sticking is a chatter image on vertical like region in a sample. We solved this problem by applying 2 methods, 1. a large cantilever vibration amplitude in tapping mode, 2. an attractive mode measurement. We demonstrate the non-sticking images by these methods.

Paper Details

Date Published: 10 May 2005
PDF: 7 pages
Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); doi: 10.1117/12.621263
Show Author Affiliations
Shigenobu Yamanaka, Daiken Chemical Co., Ltd. (Japan)
Takashi Okawa, Daiken Chemical Co., Ltd. (Japan)
Seiji Akita, Osaka Prefecture Univ. (Japan)
Yoshikazu Nakayama, Osaka Prefecture Univ. (Japan)

Published in SPIE Proceedings Vol. 5752:
Metrology, Inspection, and Process Control for Microlithography XIX
Richard M. Silver, Editor(s)

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