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Proceedings Paper

Electrostatic membrane deformable mirror characterization and applications
Author(s): Keith Bush; Anthony Marrs; Michael Schoen
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Paper Abstract

Electrostatic Membrane Deformable Mirror (MDM) technology developed using silicon bulk micro-machining techniques offers the potential of providing low-cost, compact wavefront control systems for diverse optical system applications. Electrostatic mirror construction using bulk micro-machining allows for custom designs to satisfy wavefront control requirements for most optical systems. An electrostatic MDM consists of a thin membrane, generally with a thin metal or multi-layer high-reflectivity coating, suspended over an actuator pad array that is connected to a high-voltage driver. Voltages applied to the array elements deflect the membrane to provide an optical surface capable of correcting for measured optical aberrations in a given system. Electrostatic membrane DM designs are derived from well-known principles of membrane mechanics and electrostatics, the desired optical wavefront control requirements, and the current limitations of mirror fabrication and actuator drive electronics. MDM performance is strongly dependent on mirror diameter and air damping in meeting desired spatial and temporal frequency requirements. In this paper, we discuss characterization measurements and modeling of MDM spatial and temporal performance for different mirror designs and present application results illustrating the diverse uses of MDM technology in optical wavefront compensation systems.

Paper Details

Date Published: 18 August 2005
PDF: 15 pages
Proc. SPIE 5894, Advanced Wavefront Control: Methods, Devices, and Applications III, 58940E (18 August 2005); doi: 10.1117/12.621113
Show Author Affiliations
Keith Bush, AgilOptics, Inc. (United States)
Anthony Marrs, AgilOptics, Inc. (United States)
Michael Schoen, AgilOptics, Inc. (United States)


Published in SPIE Proceedings Vol. 5894:
Advanced Wavefront Control: Methods, Devices, and Applications III
Mark T. Gruneisen; John D. Gonglewski; Michael K. Giles, Editor(s)

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