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Proceedings Paper

Extreme UV optical constants of rare-earth metals free from effects of air contamination
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Paper Abstract

The determination of EUV optical constants in rare-earth metals is much hampered by the high reactivity and easy air contamination of these materials. The most difficult regions are a long wavelengths part of the EUV interval and the vicinity of absorption edges. In this study the optical constants of La and Tb are determined in a wide energy interval 14-400 eV. The study is performed by our recent method, which is suitable for reactive materials and for intervals around the absorption edges of elements. The samples are identically protected films with thickness ~ 10 nm or ~ 100 nm, which are deposited on silicon photodiodes. Mathematical treatment separates the contributions of a capping layer and a rare-earth metal and provides data which are free from the effects of air contamination. The precision and behavior of optical constants, as well as the parameters of the O2,3 and N4,5 edges in La and Tb are analyzed.

Paper Details

Date Published: 13 September 2005
PDF: 8 pages
Proc. SPIE 5919, Soft X-Ray Lasers and Applications VI, 59190S (13 September 2005); doi: 10.1117/12.620042
Show Author Affiliations
Yu. Uspenski, Lebedev Physical Institute (Russia)
J. Seely, Naval Research Lab. (United States)
N. Popov, Lebedev Physical Institute (Russia)
I. Artioukov, Lebedev Physical Institute (Russia)
A. Vinogradov, Lebedev Physical Institute (Russia)
D. Windt, Columbia Univ. (United States)
B. Kjornrattanawanich, Univ. Space Research Association (United States)

Published in SPIE Proceedings Vol. 5919:
Soft X-Ray Lasers and Applications VI
Ernst E. Fill, Editor(s)

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