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Proceedings Paper

Generic vibration criteria for nanotechnology experiments
Author(s): A. Michael Fraumeni; Peter Heiland; Neil Judell
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Paper Abstract

Generic vibration and noise criteria (VC & NC) exist for semiconductor facility design purposes. This paper proposes to extend the criteria for use in nanotechnology facilities considering the higher level of sensitivity of new equipment without manufacturer's vibration criteria. Specifications are derived for air-borne and structure-borne excitation. The new criteria are referred to as 'VC-NT and NC-NT' curves and proposed to be used for the design of new laboratories and nanotechnology facilities. Three case studies are used to validate the criteria.

Paper Details

Date Published: 29 August 2005
PDF: 14 pages
Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 59330T (29 August 2005); doi: 10.1117/12.619404
Show Author Affiliations
A. Michael Fraumeni, Integrated Dynamics Engineering, Inc. (United States)
Peter Heiland, Integrated Dynamics Engineering, Inc. (United States)
Neil Judell, Integrated Dynamics Engineering, Inc. (United States)


Published in SPIE Proceedings Vol. 5933:
Buildings for Nanoscale Research and Beyond
Hal Amick, Editor(s)

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