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Proceedings Paper

Development of a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer
Author(s): Jinwon Park; Jaegeun Jo; Sangho Byun; Cheon Il Eom
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Paper Abstract

We have developed a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer (COXI). The system consists of optical interferometers for two-dimensional displacements and an x-ray interferometer. The x-ray interferometer was used to calibrate the non-linearity of the optical interferometers. The x-ray interferometer can subdivide the optical interference signal with 0.2 nm linear scales. The measured non-linearity of the heterodyne optical interferometer was less than 2 nm. The calibrated optical interferometers were used to measure two dimensional nanoscale displacements, and the accuracy of the optical interferometers was reduced to sub-nanometer after the compensation. To demonstrate the application of the system, we have measured the non-linearity of capacitive sensors using the calibrated optical interferometers.

Paper Details

Date Published: 18 August 2005
PDF: 8 pages
Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 587912 (18 August 2005); doi: 10.1117/12.619174
Show Author Affiliations
Jinwon Park, Korea Research Institute of Standards and Science (South Korea)
Jaegeun Jo, Korea Research Institute of Standards and Science (South Korea)
Sangho Byun, Korea Research Institute of Standards and Science (South Korea)
Cheon Il Eom, Korea Research Institute of Standards and Science (South Korea)


Published in SPIE Proceedings Vol. 5879:
Recent Developments in Traceable Dimensional Measurements III
Jennifer E. Decker; Gwo-Sheng Peng, Editor(s)

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