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Proceedings Paper

Multiple functions long trace profiler (LTP-MF) for National Synchrotron Radiation Laboratory of China
Author(s): Shinan Qian; Qiuping Wang; Yilin Hong; Peter Takacs
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Paper Abstract

The Long Trace Profiler (LTP) is a useful optical metrology instrument for measuring the figure and slope error of cylindrical aspheres commonly used as synchrotron radiation (SR) optics. It is used extensively at a number of synchrotron radiation laboratories around the world. In order to improve SR beam line quality and resolution, the National Synchrotron Radiation Laboratory (NSRL) of China is developing a versatile LTP that can be used to measure both SR optics and more conventional "normal" optical surfaces. The optical metrology laboratories at Brookhaven National Laboratory (BNL) and NSRL are collaborating in developing a multiple functions LTP (LTP-MF). Characteristics of the LTP-MF are: a very compact and lightweight optical head, a large angular test range (±16 mrad) and high accuracy. The LTP-MF can be used in various configurations: as a laboratory-based LTP, an in-situ LTP or penta-prism LTP, as an angle monitor, a portable LTP, and a small radius of curvature test instrument. The schematic design of the compact optical head and a new compact slide are introduced. Analysis of different measurements modes and systematic error correction methods are introduced.

Paper Details

Date Published: 15 September 2005
PDF: 7 pages
Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 592104 (15 September 2005); doi: 10.1117/12.618800
Show Author Affiliations
Shinan Qian, Brookhaven National Lab. (United States)
Qiuping Wang, National Synchrotron Radiation Lab./Univ. of Science and Technology of China (China)
Yilin Hong, National Synchrotron Radiation Lab./Univ. of Science and Technology of China (China)
Peter Takacs, Brookhaven National Lab. (United States)


Published in SPIE Proceedings Vol. 5921:
Advances in Metrology for X-Ray and EUV Optics
Lahsen Assoufid; Peter Z. Takacs; John S. Taylor, Editor(s)

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