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Proceedings Paper

Real-time stability and profile comparison measurements between two different LTPs
Author(s): Shinan Qian; Duan Jen Wang
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Paper Abstract

The Long Trace Profiler (LTP) is a precise angle measurement instrument, with a sensitivity and accuracy that can be in the sub-micron radian range. LTP characteristics depend on the particular LTP system schematic design, and the quality of components and assembly. The conditions of temperature, alignment, and mirror support during the measurement proccess vary between different laboratories, which influences significantly the test repeatability and accuracy. In this paper we introduce a direct comparison method to test the same object at the same point in the same environment at the same time by using two LTPs, which significantly increases the reliability of the comparison. A compact, portable LTP (PTLTP), which can be carried to different laboratories around the world, is used for comparison testing. Stability comparison experiments between the LTP II at the National Synchrotron Radiation Research Center (NSRRC), and the PTLTP of Brookhaven National Laboratory (BNL) reveal significant differences in performance between the instruments. The experiment is set up so that each optical head simultaneously records both its own sample probe beam and also the probe beam from the other optical head. The two probe beams are reflected from same point on the mirror. Tests show that the stability of the PTLTP with a monolithic beam splitter is 10 times better than the stability of the LTP II which has a separated beam splitter unit. A scheme for comparing scanning measurements of a mirror is introduced. Experimental results show a significant difference between the two LTPs due mainly to distortions in the optical components inside the optical head. A new scheme is proposed for further mirror comparison scanning tests.

Paper Details

Date Published: 16 September 2005
PDF: 8 pages
Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 59210K (16 September 2005); doi: 10.1117/12.618791
Show Author Affiliations
Shinan Qian, Brookhaven National Lab. (United States)
Duan Jen Wang, National Synchrotron Radiation Research Ctr. (Taiwan)

Published in SPIE Proceedings Vol. 5921:
Advances in Metrology for X-Ray and EUV Optics
Lahsen Assoufid; Peter Z. Takacs; John S. Taylor, Editor(s)

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