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Proceedings Paper

Object surface topography by means of a speckle correlation
Author(s): Petr Smid; Pavel Horvath; Petra Wagnerova; Miroslav Hrabovsky
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Paper Abstract

In this paper we present an optical method based on speckle pattern correlation for measurement of the topography of a surface of an object under investigation. When this object is illuminated with coherent laser beam the arising speckle pattern bears information about the height profile of the object. The resolution of this method is influenced by geometrical parameters of optical measurement set-up. The designed experimental set-up for the measurement of the slope of the object with rough surface is described. Achieved results are presented in comparison with theoretic values.

Paper Details

Date Published: 13 June 2005
PDF: 6 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.618634
Show Author Affiliations
Petr Smid, Joint Lab. of Optics, Palacky Univ. and Institute of Physics (Czech Republic)
Pavel Horvath, Joint Lab. of Optics, Palacky Univ. and Institute of Physics (Czech Republic)
Petra Wagnerova, Joint Lab. of Optics, Palacky Univ. and Institute of Physics (Czech Republic)
Miroslav Hrabovsky, Joint Lab. of Optics, Palacky Univ. and Institute of Physics (Czech Republic)


Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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