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Proceedings Paper

Evolving criteria for research facilities: vibration
Author(s): Hal Amick; Michael Gendreau; Todd Busch; Colin Gordon
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Paper Abstract

The paper presents a review of generic vibration criteria used for vibration-sensitive technical facilities. The paper reviews the logic behind and evolution of the Vibration Criterion (VC) curves, originally known as the "BBN" criteria, and discusses the background of a generic criterion in common usage for nanotechnology, currently denoted NIST-A. The criteria are compared with representative types of research equipment and activities.

Paper Details

Date Published: 18 August 2005
PDF: 13 pages
Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 593303 (18 August 2005); doi: 10.1117/12.617970
Show Author Affiliations
Hal Amick, Colin Gordon & Associates (United States)
Michael Gendreau, Colin Gordon & Associates (United States)
Todd Busch, Colin Gordon & Associates (United States)
Colin Gordon, Colin Gordon & Associates (United States)


Published in SPIE Proceedings Vol. 5933:
Buildings for Nanoscale Research and Beyond
Hal Amick, Editor(s)

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