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Proceedings Paper

Double optical monitoring of time-dependent film formation
Author(s): Alexandre F. Michels; Thiago Menegotto; Hans-Peter H. Grieneisen; Celso V. Santilli; Flavio Horowitz
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Paper Abstract

A brief overview of optical monitoring for vacuum and wet bench film deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous real-time monitoring of refractive index and physical thickness. Monitor stability and accuracy are verified with transparent oil standards. This double optical technique is applied to dip coating with a multi-component Zirconyl Chloride aqueous solution, whose time varying refractive index and physical thickness curves indicate significant sensitivity to changes of film flow properties during the process.

Paper Details

Date Published: 22 August 2005
PDF: 6 pages
Proc. SPIE 5870, Advances in Thin-Film Coatings for Optical Applications II, 58700C (22 August 2005); doi: 10.1117/12.617967
Show Author Affiliations
Alexandre F. Michels, Univ. Federal do Rio Grande do Sul (Brazil)
Thiago Menegotto, Univ. Federal do Rio Grande do Sul (Brazil)
Hans-Peter H. Grieneisen, Univ. Federal do Rio Grande do Sul (Brazil)
Celso V. Santilli, Univ. Estadual de Sao Paulo (Brazil)
Flavio Horowitz, Univ. Federal do Rio Grande do Sul (Brazil)


Published in SPIE Proceedings Vol. 5870:
Advances in Thin-Film Coatings for Optical Applications II
Michael L. Fulton; Jennifer D. T. Kruschwitz, Editor(s)

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