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Proceedings Paper

Shaping of thin grazing-incidence reflection grating substrates via magnetorheological finishing
Author(s): Ralf K. Heilmann; Mireille Akilian; Chi-Hao Chang; Robert Hallock; Ed Cleaveland; Mark L. Schattenburg
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Paper Abstract

Reflection gratings offer high dispersion and thus the potential for high spectral resolution in the soft x-ray band. The requirements of high efficiency and maximum collecting area at minimum mass lead to the desire for densely stacked and exquisitely flat thin-foil grating substrates. In the past we have successfully addressed the problems of thin substrate figure metrology and blazed grating profile fabrication. Our recently developed low-stress thin-foil metrology truss with 50 nm figure repeatability removed a metrology bottleneck and allows us to make progress in the shaping of thin-foil substrates. We present results on the figuring of 100 mm-diameter silicon wafers via magnetorheological finishing to a flatness below 100 nm peak-to-valley, allowing for sub-arcsecond reflection optics.

Paper Details

Date Published: 1 September 2005
PDF: 7 pages
Proc. SPIE 5900, Optics for EUV, X-Ray, and Gamma-Ray Astronomy II, 590009 (1 September 2005); doi: 10.1117/12.617788
Show Author Affiliations
Ralf K. Heilmann, MIT Kavli, Institute for Astrophysics and Space Research (United States)
Mireille Akilian, MIT Kavli, Institute for Astrophysics and Space Research (United States)
Chi-Hao Chang, MIT Kavli, Institute for Astrophysics and Space Research (United States)
Robert Hallock, QED Technologies (United States)
Ed Cleaveland, QED Technologies (United States)
Mark L. Schattenburg, MIT Kavli, Institute for Astrophysics and Space Research (United States)


Published in SPIE Proceedings Vol. 5900:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy II
Oberto Citterio; Stephen L. O'Dell, Editor(s)

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