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Proceedings Paper

Design and test of a differential scanning stage system for an x-ray nanoprobe instrument
Author(s): D. Shu; J. Maser; M. Holt; B. Lai; S. Vogt; Y. Wang; C. Preissner; Y. Han; B. Tieman; R. Winarski; A. Smolyanitskiy; G. B. Stephenson
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Paper Abstract

We have developed a prototype instrument with a novel interferometrically controlled differential scanning stage system. The system consists of 9 DC-motor-driven stages, 4 picomotor-driven stages, and 2 PZT-driven stages. A custom-built laser Doppler displacement meter system provides two-dimensional (2D) differential displacement measurement with subnanometer resolution between the zone-plate x-ray optics and the sample holder. The entire scanning system was designed with high stiffness, high repeatability, low drift, flexible scanning schemes, and possibility of fast feedback for differential motion. Designs of the scanning stage system, as well as preliminary mechanical test results, are presented in this paper.

Paper Details

Date Published: 13 September 2005
PDF: 13 pages
Proc. SPIE 5877, Optomechanics 2005, 58770E (13 September 2005); doi: 10.1117/12.617723
Show Author Affiliations
D. Shu, Argonne National Lab. (United States)
J. Maser, Argonne National Lab. (United States)
M. Holt, Argonne National Lab. (United States)
B. Lai, Argonne National Lab. (United States)
S. Vogt, Argonne National Lab. (United States)
Y. Wang, Argonne National Lab. (United States)
C. Preissner, Argonne National Lab. (United States)
Y. Han, Argonne National Lab. (United States)
Illinois Institute of Technology (United States)
B. Tieman, Argonne National Lab. (United States)
R. Winarski, Argonne National Lab. (United States)
A. Smolyanitskiy, Argonne National Lab. (United States)
Illinois Institute of Technology (United States)
G. B. Stephenson, Argonne National Lab. (United States)


Published in SPIE Proceedings Vol. 5877:
Optomechanics 2005
Alson E. Hatheway, Editor(s)

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