Share Email Print
cover

Proceedings Paper

Two and three-dimensional photonic crystals of titanium dioxide and optical properties
Author(s): Koichi Awazu; Xiaomin Wang; Makoto Fujimaki; Hiroaki Imai; Taketo Kuriyama; Yoshimichi Ohki
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Two-dimensional photonic crystals of titanium dioxide are predicted to have many advantages over semiconductor photonic crystals, e.g., silicon and GaAs: in particular, low optical loss in the near infrared region used for optical communication, low thermal expansion, and a refractive index which is close to that of optical fibers. However, it is difficult to create micro-nano structures in titanium dioxide, since semiconductor micro-fabrication techniques cannot be applied to titanium dioxide. As the first step, we calculated the photonic band gap of titanium dioxide rod-slab on SiO2. Band gap percent against thickness of the rod-slab was also examined. Finally, we confirmed the most suitable structure for 2D photonic crystals. A deep X-ray lithography technique was employed to create a very deep and precise template. Liquid-phase deposition was then used to faithfully deposit a tightly packed layer of titanium oxide onto the template. Finally, the template was selectively removed to obtain a photonic nano-structure. A template for the most appropriate three dimensional structure was also fabricated using the method proposed by Yablonovitch. By employing the same method, we successfully obtained the 3D structure of TiO2.

Paper Details

Date Published: 26 August 2005
PDF: 8 pages
Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 593106 (26 August 2005); doi: 10.1117/12.617647
Show Author Affiliations
Koichi Awazu, National Institute of Advanced Industrial Science and Technology (Japan)
Xiaomin Wang, National Institute of Advanced Industrial Science and Technology (Japan)
Makoto Fujimaki, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroaki Imai, Keio Univ. (Japan)
Taketo Kuriyama, Waseda Univ. (Japan)
Yoshimichi Ohki, Waseda Univ. (Japan)


Published in SPIE Proceedings Vol. 5931:
Nanoengineering: Fabrication, Properties, Optics, and Devices II
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

© SPIE. Terms of Use
Back to Top