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Proceedings Paper

Vibration measurement of MEMS by digital laser microinterferometer
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Paper Abstract

A digital laser microinterferometer with a capability to measure both static and dynamic properties of MEMS (Micro-Electro-Mechanical Systems) and microstructures has been developed. This system is designed to exploit a static and a dynamic measurements of microstructure such as MEMS with either a smooth or a rough surface. The method is based on digital laser Michelson interferometry and digital speckle pattern speckle interferometry (TV - holography) incorporated with optoelectronic devices including a special illumination system, a long distance microscope (LDM), a CCD camera, a high precise phase shifting unit and a signal generator for vibration measurement. The special illumination system can perform both a continuous (for static measurements) and a stroboscopic (for dynamic measurements) illumination by utilizing a Acoustic-Optic-Modulator (AOM). In this paper, the theory and methodology of the digital laser micro-interferometer with the stroboscopic illumination method are described. The usefulness of the micro-interferometer is demonstrated by examples of static and dynamic measurements for different MEMS.

Paper Details

Date Published: 19 August 2005
PDF: 9 pages
Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780C (19 August 2005); doi: 10.1117/12.617592
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Published in SPIE Proceedings Vol. 5878:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
Angela Duparre; Bhanwar Singh; Zu-Han Gu, Editor(s)

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