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Proceedings Paper

Gaussian beam modeling of the radius of curvature
Author(s): Kate M. Medicus; James Snyder; Angela D. Davies
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Paper Abstract

A Gaussian model of the radius measurement of micro-optics has been developed and tested using simulations. The model is based on the propagation distances in the interferometer, a heretofore uninvestigated effect. The goal of the model is to determine the bias error in the radius due to the Gaussian Beam propagation model. After testing the model with varying conditions, we have concluded the following: the measured part is smaller than the input, the cat's eye and confocal positions have approximately the same error, radius error increases with smaller test parts, decreasing the numerical aperture increases the errors, and the propagation distances do not affect the radius. The outline of the experimental plan to be used to verify the results is given.

Paper Details

Date Published: 18 August 2005
PDF: 9 pages
Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 58790A (18 August 2005); doi: 10.1117/12.617539
Show Author Affiliations
Kate M. Medicus, UNC Charlotte (United States)
James Snyder, UNC Charlotte (United States)
Angela D. Davies, UNC Charlotte (United States)

Published in SPIE Proceedings Vol. 5879:
Recent Developments in Traceable Dimensional Measurements III
Jennifer E. Decker; Gwo-Sheng Peng, Editor(s)

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