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Proceedings Paper

Site conditions for high resolution surface analytical systems and environmental influence on instrument performance
Author(s): Bernd Guenther; A. Feltz; T. Berghaus; A. Bettac
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Paper Abstract

The increasing performance of high resolution surface analytical instruments, in the nanometer range, requires suitable site conditions, in order to achieve the design performance specifications. Due to our practical experience in selling these instruments over the last twenty years we have established a well defined procedure, which is used for the characterisation of new instruments, as well as for the assessment of customer site conditions.

Paper Details

Date Published: 18 August 2005
PDF: 5 pages
Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 593302 (18 August 2005); doi: 10.1117/12.617365
Show Author Affiliations
Bernd Guenther, Omicron Nanotechnology GmbH (Germany)
A. Feltz, Omicron Nanotechnology GmbH (Germany)
T. Berghaus, Omicron Nanotechnology GmbH (Germany)
A. Bettac, Omicron Nanotechnology GmbH (Germany)

Published in SPIE Proceedings Vol. 5933:
Buildings for Nanoscale Research and Beyond
Hal Amick, Editor(s)

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