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Proceedings Paper

Comprehensive reticle handling and storage approach for optimized fab yields
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Paper Abstract

In the field, each customer uses their owned designed reticle case as for shipping, storage. To modify the case is so expensive that it is very difficult to improve, especially in time respect. At the blank suppliers, they ship their mask blanks packing into their owned designed multiple shipper, however the market needs single shipper with next generation blanks to prevent from particle and outgas of case material damage. At the mask shops, most of them use MP567 (Trade mark of Dainichi Shoji K.K.) single case which was designed about 15 years ago to ship their products to their customers. It is not designed for robot handling, so contamination from manual handling makes reticle damaged. Adhesive tape is also required to seal it, so chemical contamination will be occurred on quartz glass, i.e. haze. At the IC fabs, scanner case such as Nikon, Canon and ASML case is the most common in their process. However these cases are not airtight, so they cannot be handled under class 10000 circumstances. RSP (Reticle SMIF Pod) is airtight case and has a capability of automatic transportation, however it is very expensive compared to other cases. We develop new mask case named Universal Reticle Pod (URP) at affordable price so as to be used as shipping, storage and process case, so we would like to report its performance in this paper.

Paper Details

Date Published: 28 June 2005
PDF: 11 pages
Proc. SPIE 5853, Photomask and Next-Generation Lithography Mask Technology XII, (28 June 2005); doi: 10.1117/12.617128
Show Author Affiliations
Toshiya Umeda, Valqua High Performance Polymers Co., Ltd. (Japan)
Hideaki Kawashima, Hakuto Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 5853:
Photomask and Next-Generation Lithography Mask Technology XII
Masanori Komuro, Editor(s)

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