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Proceedings Paper

Automatic LCD electro-optical characteristics measurement system based on generalized spectroscopic ellipsometry
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Paper Abstract

Liquid crystal displays (LCDs) or thin-film transistor (TFT) LCDs have been regarded as a promising technology in flat panel displays (FPDs). To meet the demands of the mass production and quality control, the development of automatic electro-optical characteristics measurement systems for LCDs is very important. To achieve this, we propose a generalized spectroscopic ellipsometry (GSE) based technique to measure the characteristics of LCDs. Our approach involves two primary steps. First, we review a theoretical basis for generalized spectroscopic ellipsometries for the LCD measurement. Those are mainly categorized into two classes of ellipsometries: the transmission variable angle spectroscopic ellipsometry (VASE) and the spectroscopic ellipsometry (SE) using a photoelastic modulator (PEM), called PEM SE. Second, on the basis of the VASE and PEM SE, we present a GSE-based system to measure the electro-optical characteristics for twisted nematic liquid crystals (TNLCs) and super twisted nematic liquid crystals (STNLCs). In this paper, the simulation results indicate the feasibility of this technique. Finally, the automatic GSE-based system is presented for measuring the LCD electro-optical characteristics.

Paper Details

Date Published: 31 August 2005
PDF: 9 pages
Proc. SPIE 5875, Novel Optical Systems Design and Optimization VIII, 58750W (31 August 2005); doi: 10.1117/12.616875
Show Author Affiliations
Gao-Wei Chang, National Taiwan Normal Univ. (Taiwan)
Yu-Hsuan Lin, National Taiwan Normal Univ. (Taiwan)


Published in SPIE Proceedings Vol. 5875:
Novel Optical Systems Design and Optimization VIII
Jose M. Sasian; R. John Koshel; Richard C. Juergens, Editor(s)

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