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Proceedings Paper

Design and development of multi functional confocal laser scanning microscope with UV / VIS laser source
Author(s): Yoshikazu Kanai; Yousuke Kanzaki; Moriaki Wakaki; Norihide Takeyama
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Paper Abstract

A high resolution Confocal Laser Scanning Microscope (CLSM) with UV / VIS light sources was developed as the first step of multi-functional microscope. The optical system is designed to optimize for both UV and VIS wavelengths. An UV laser is used to achieve higher resolution, and a VIS is for multi functions. A new objective lens specialized for this application was designed and fabricated. Specification of the lens and the optical system is NA:0.95, EFL:2.5mm, WD:1.5mm, Resolution:160nm and achromatic for two wavelengths of UV 325.0nm / VIS 632.8nm. Several specimens were characterized to check the performance of the system. Some optical materials under study were measured for evaluation, and interesting results could be obtained. Multi-functional measurements are being planed as a next step. This system will help the research of nano-structures, photonic-crystals and biology.

Paper Details

Date Published: 24 August 2005
PDF: 8 pages
Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58781D (24 August 2005); doi: 10.1117/12.616637
Show Author Affiliations
Yoshikazu Kanai, Tokai Univ. (Japan)
Genesia Corp. (Japan)
Yousuke Kanzaki, Tokai Univ. (Japan)
Moriaki Wakaki, Tokai Univ. (Japan)
Norihide Takeyama, Genesia Corp. (Japan)


Published in SPIE Proceedings Vol. 5878:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
Angela Duparre; Bhanwar Singh; Zu-Han Gu, Editor(s)

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