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Proceedings Paper

Surface texture investigation of ultra-precision optical components
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Paper Abstract

To meet the ever increasing requirements for high quality optical surfaces, components and systems, high-sensitive and flexible analysis of optical losses, nano-roughness and defects is necessary. In this paper, we present the set-ups developed at the Fraunhofer Institute in Jena for total and angle resolved scattering measurements from the VUV and VIS up to the IR spectral regions. Examples are presented for light scattering investigations of the texture of ultraprecision mirrors produced by diamond turning. Experiments are described which were carried out to test the possibilities for nano- and micro defect detection using these set-ups. Furthermore, the relationship between the scattering properties of dielectric multilayer mirrors and their interface texture is discussed for highly reflective DUV mirrors.

Paper Details

Date Published: 1 September 2005
PDF: 8 pages
Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 587813 (1 September 2005); doi: 10.1117/12.616500
Show Author Affiliations
Sven Schroeder, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Juliane Ratteit, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Stefan Gliech, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Angela Duparre, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)


Published in SPIE Proceedings Vol. 5878:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
Angela Duparre; Bhanwar Singh; Zu-Han Gu, Editor(s)

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