Share Email Print
cover

Proceedings Paper

Novel 3D scanner based on electrostatically driven resonant micromirrors
Author(s): Uwe Schelinski; Andeas Bergmann; Hans-Georg Dallmann; Christian Gerwig; Ljudmila Kleinmann; Hubert Lakner; Petra Nauber; Hannes Neumann; Michael Scholles; Alexander Wolter
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This contribution presents a new scanning principle and device for 3-dimensional digital capturing and measurement of objects based on the triangulation method. The key elements are MOEMS, in particular electrostatically excited, harmonically oscillating micromechanical mirrors, which are useful means for light projection as well as for light detection. A configuration for capturing the trace of a static illumination is described, which applies a micro scanning mirror that oscillates in two axes. A synchronization method is proposed in order to apply micro scanning mirrors for both patterned illumination and light detection. For proving both techniques a test setup has been designed and assembled, and first results based on a static illumination are outlined.

Paper Details

Date Published: 1 August 2005
PDF: 10 pages
Proc. SPIE 5873, Optical Scanning 2005, (1 August 2005); doi: 10.1117/12.616486
Show Author Affiliations
Uwe Schelinski, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Andeas Bergmann, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Hans-Georg Dallmann, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Christian Gerwig, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Ljudmila Kleinmann, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Hubert Lakner, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Petra Nauber, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Hannes Neumann, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Michael Scholles, Fraunhofer Institut Photonische Mikrosysteme (Germany)
Alexander Wolter, Fraunhofer Institut Photonische Mikrosysteme (Germany)


Published in SPIE Proceedings Vol. 5873:
Optical Scanning 2005
Stephen F. Sagan; Gerald F. Marshall, Editor(s)

© SPIE. Terms of Use
Back to Top