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Proceedings Paper

Real-time measurement of the small aspheric surface
Author(s): Ho-Soon Yang; Jae-Bong Song; Yun-Woo Lee; Hoi-Yoon Lee; Jae-Hyeob Lee; In-Won Lee
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Paper Abstract

Most aspheric surfaces have been measured by null lens test or computer generated hologram (CGH) method. This approach, however, often fails when there are many aspherical terms or target surface is very small because it is not easy to design the conventional null lens or CGH. Hartmann test is a good choice for this case because it has a larger dynamic range than the general interferometer. This means that the surface can be measured with a Hartmann test without null correctors or with incomplete null correctors. In this paper, we apply the Hartmann test to the measurement of convex aspheric surface of which diameter is about 16 mm and has 4 additional aspheric terms. In order to measure the surface in real-time, we developed some CGH target that simulates the ideal target surface and the simple optical system. The measurement result can be served as a reference so that the form error of the target surface can be obtained by the subtraction of this reference, to achieve highly accurate measurement in real-time.

Paper Details

Date Published: 18 August 2005
PDF: 8 pages
Proc. SPIE 5869, Optical Manufacturing and Testing VI, 586916 (18 August 2005); doi: 10.1117/12.616460
Show Author Affiliations
Ho-Soon Yang, Korea Research Institute of Standards and Science (South Korea)
Jae-Bong Song, Korea Research Institute of Standards and Science (South Korea)
Yun-Woo Lee, Korea Research Institute of Standards and Science (South Korea)
Hoi-Yoon Lee, Korea Research Institute of Standards and Science (South Korea)
Jae-Hyeob Lee, Korea Research Institute of Standards and Science (South Korea)
In-Won Lee, Korea Research Institute of Standards and Science (South Korea)


Published in SPIE Proceedings Vol. 5869:
Optical Manufacturing and Testing VI
H. Philip Stahl, Editor(s)

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